Search results
Search for "focused helium ion beam-induced deposition" in Full Text gives 1 result(s) in Beilstein Journal of Nanotechnology.
A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope
Beilstein J. Nanotechnol. 2021, 12, 633–664, doi:10.3762/bjnano.12.52
- ; focused helium ion beam-induced deposition; focused helium ion beam milling; helium ion beam lithography; helium ion implantation; Introduction Since the helium ion microscope (HIM) was introduced 15 years ago [1][2][3], over one hundred HIMs have been installed worldwide and over one thousand research
Other Beilstein-Institut Open Science Activities
